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IDC GAS SENSORS USING ORGANICALLY MODIFIED SILICATE LAYERS AS GAS-SENSING SUBSTANCES
Obermeier, E. Lin, J. Müller, T. Hutter, F.
Obermeier, E.
Lin, J.
Müller, T.
Hutter, F.
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Issue Date
1989
Submitted date
2023-12-06
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Abstract
The dielectric properties of organically modified silicates change
under the influence of gases such as NO,, NH, and SO,. Thin layers of
these materials are applied as dielectric to thin film interdigital
capacitors (IDC). It is possible thereby to detect changes of the
dielectric properties of the layers through the change in the
capacitance and conductivity of the capacitor. The results obtained
with a layer optimized for SO, detection are presented; the layer is
characterized by good linearity in the range of 2 to 10 vpm SO, and
low cross sensitivity to humidity of up to 23000 vpm at 30°C.
Citation
Biosensors : applications in medicine, environmental protection and process control, 183 - 187
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Type
Book chapter
conference paper
conference paper
Language
en
Description
Series/Report no.
GBF monographs ; Volume 13
ISSN
0930-4320
EISSN
ISBN
0895739550
3527280324
3527280324
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Attribution-NonCommercial-ShareAlike 4.0 International